|Travel speed Up to||4 m/s|
|Accuracy||± 15 μm|
|Dynamic Position Z:||1.2 ± 0.6 mm|
|Dynamic Position Y:||0 ± 0.6 mm|
|Dynamic Position tilts, Rx, Ry, Rz:||±5, ±3, ±3 mrad|
|Encoder Interface||Various Options|
|Temp range||-40 to 115 ÷C|
|Permissible relative humidity||<90% no condensation allowed|
|Resistance To shocks||DIN IEC 68 part2 -27|
|Resistance To vibration||DIN IEC 68 part2 -6|
|Scale Width Up to||25 mm|
|Measurement Range Up to||2 m|
It was required to control the movement of an object over a large stage of 2000 x 1000 mm which is also in motion with high accelerations. Due to the dynamics of the motion system it is required to be able to sustain extended misalignments on the movement of the moving arm, at the millimeters level. The solution must be able to endure strong acceleration patterns. In addition a version fully operational under high vacuum conditions is required.
The following implementation was developed: Two encoders, one of 2 m length and the second of 1 m length, in an active all implementation (active circuitry in both the scale and the read head) were developed. The solution is in production since 2007 with a vacuum compatible version in production since 2010.