Mechanical operational range (X, Y) | (80 mm, 80 mm) |
Repeatability | +/- 10μm |
Absolute accuracy over full range2 | +/- 25μm |
Resolution | 1 μm |
Maximum operating speed (Vx,Vy) | 0.5 m/sec |
Air gap (Z) | 0.8±0.2 mm |
- +972-4-6300910
- info@kappasense.com
- Misgav Industrial Park, Israel
- info@kappasense.com